電気泳動現象を利用した超微粒砥石の作成法に関する研究 : 既存の結合剤の適用に関する検討

概要

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The realization of a minute grain depth of cut is an important feature for obtaining a supersmooth surface by grinding. It is desirable to apply a grinding wheel composed of ultrafine abrasives which the diameters areφ10 to 20 nm. but it is difficult to mold homogeneous one due to cohesion of the grains. We have already reported that homogeneous ultrafine abrasive pellets could be manufactured applying electrophoretic deposition and that grinding using the pellets accomplished supersmooth surface less than 10 nmR_<max> for hard and brittle materiales. However, the bonding agent was sodium alginate which was not familier to grinding wheel makers. Thus the manufacture of ultrafine abrasive pellets using conventional bonding agent was examined in this paper in order to apply their knowledge to production of the pellets, As a result, homogeneous ultrafine abrasive pellets using PVA bonding agents could be developed and accomplished nanometer grinding of silicon wafers.
一般社団法人日本機械学会の論文
1993-06-25