永久磁石式磁気軸受併用によるエアスピンドルの高精度高剛性化

概要

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In this paper, a permanent magnetic radial bearing activated by piezoelectric transducers is proposed to be combined with an air-spindle to improve the rotational accuracy and stiffness. Besides a PID controller, a repetitive controller is applied to the magnetic bearing to suppress the highly repeatable rotational errors of the air-spindle. It has been ascertained by experiments that at 300 - 1200rpm the rotational accuracy can be improved by control from the uncontrolled 30 - 50nm to the controiled 4 - 8nm. However, the non-repeatable rotational errors could not be suppressed because it was nearly equal to the noise level of the capacitive sensors detecting the errors. An infinite static stiffness was obtained under a load less than 3.8N which was the load capacity of the magnetic bearing. Dynamic stiffness was increased by 5 - 15dB comparing with the original air-spindle.
公益社団法人精密工学会の論文
1999-04-05