レーザ光線を利用した3次元微小構造物の組立技術に関する研究 : 第2報, 接着剤による構造物の強化

概要

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A 3-d manipulation and a new micro assembly technique of fine particles operated by a YAG laser beam have already been studied in the 1st paper. They are expected to be effective in assembling a micro ratachine or a micro-device in the future. Although the fine particles can be assentbled in both horizontal and vertical direction without any bonding agent because of the surface tension, the strength of a micro structure consisted of many fine particles may weak. In this paper, a new bonding technique is developed to temper the structure in the assembling process. Hereby fine particles are covered with acrylic resin, which is used as a bonding agent. The strength test shows that the micro structure constructed by the particles coated with acrylic resin is much more durable than that uncoated. Therefore the effectiveness of the bonding agent is confirmed.
1999-05-25