レーザ光線を利用した3次元微小構造物の組立技術に関する研究 : 第1報, 空中における微粒子の操作法に組立法の提案

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The focus of this paper is concerned about a newly developed micro assembly technique using YAG laser beam. When a silica fine particle is put on a soda glass plate and irradiated by a single laser beam from the above, we found it becomes levitated and trapped along the optical axis in the air. It is for the first time that this special phenomenon has ever discovered, and its mechanism is difficult to be explained only by the traditional optical radiation pressure theory, some other unknown factors may be also included in it. The trapped particle can be manipulated in fully three dimensional orientation by scanning the laser beam or lifting and pulling down the working stage. This new 3 D-manipulation technique is expected to be an effective way to handle with micro assemblies for micro-device or micro-machine in the future. In this paper, the fundamental assembling experiments were done. The vertical and horizontal assemblies of plural fine particles, furthermore, the assembly of a 3 D micro-structure with a tetrahedron form by 10 fine particles were experimentally proved
1998-11-25