機能化送りねじ機構 : 第1報,原理と試作機構の諸特性

概要

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This paper describes the principle of an active lead screw mechanism # (ALSM) and the basic characteristics of its experimental mechanism. The ALSM is comprised of a lead screw, two nuts, piezoelectric actuators #(PEAs) and a movable table. The table is connected to the nuts through the PEAs so that the PEAs can control the amount of the backlash and the position of the table. The ALSM has following capabilities ; (1) when the table is to be driven fast and positioned coarsely by a motor, a sufficient backlash can be given between the screw and nuts, (2) after the table is positioned coarsely, the backlash can be eliminated by the PEAs so as to give the ALSM a sufficient stiffness, and (3) keeping the backlash at zero, the table can be positioned precisely by the PEAs. The experimental mechanism achieved : (1) the maximum table speed ; 130 mm/s, (2) the positioning accuracy ; better than l0 nm, (3) the positioning time for a 10 mm step input ; 369 ms.
一般社団法人日本機械学会の論文
1993-02-25