電気泳動現象を利用した超微粒砥石の開発とその応用

概要

論文の詳細を見る
The existence of numerous active grains, which results in a minute grain depth of cut, is an important feature for obtaining a supersmooth surface by grinding. It is desirable to apply a grinding wheel with a large grit number in order to increase the number of active grains, but it is difficult to mold homogeneous grinding wheels composed of fine grains due to the cohesion of the grains. Abrasive pellets composed of 10 to 20 nm ultrafine grains have been newly developed by applying electrophoretic deposition. In the manufacturing process, dispersive fine abrasives wrapped by electrolytic bonding agents cohered around an electrode due to an electrodynamics motion, which resulted in the formation of homogeneous and dense abrasive pellets. Therefore, the pellets had a higher bonding strength than those produced merely by desiccation so that a surface finish of less than 10 nm with no cutting marks was obtained in a short time by grinding a silicon wafer using the silica pellets.
一般社団法人日本機械学会の論文
1991-03-25