SIMOX法で作製したSi微粒子界面の高分解能観察とモデル化

概要

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Highly-oriented Si nanoparticles(SNP) were precipitated in amorphous SiO_2 using separation by implanted oxygen(SIMOX) method and showed visible luminescence at room temperature. In order to investigate the microstructure of the SNPs, we observed the Si/SiO_2 interface by cross-sectional high-resolution transmission electron microscopy(HRTEM). The three-dimensional shape of the SNPs observed from different directions is an{111}-surrounded octahedral structure, each apex of which has an{100}facet. The upper(surface-side)interface of SiO_2/Si(100)contains missing atomic rows, while the lower(substrate-side)interface of Si(100)/SiO_2 is atomically flat except for the steps at the intersection with(111)plane. Similar atomically sharp structures were observed at the Si{111}/SiO_2 interfaces. Image-simulation of the interfaces well reproduced the microstructures observed by HRTEM and proved that the interfaces are those of amorphous SiO_2 and single-crystal Si without any intermediate layer.
社団法人日本セラミックス協会の論文
1998-12-01