イオンビーム支援蒸着法で形成した窒化炭素薄膜の破壊特性

概要

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Carbon Nitride (C-N) films which were formed by ion-beam-assisted deposition has a good mechanical performance. The reason is that C-N films have sp^2 and sp^3 bonds and nanotube-like structure. C-N films have better wear property than general DLC films. In order to clarify the mechanical properties further, fracture characteristics and adhesion strength are examined. The fracture patterns were observed by in-situ surface observation system and fracture toughness was measured by nanoindentation in CN and CN/TiN films. The fracture pattern did not watch in CN and CN/TiN films. The value of fracture toughness in CN films is more than in DLC films. Scratch traces were observed by microscopy and AES. In C/TiN films peel occurred among C films and TiN buffer layer and substrate, but in CN/TiN films peel was only observed between TiN and the substrate. The results show, CN films have good fracture characteristics and strong bonding with the TiN films.
公益社団法人精密工学会の論文
2005-03-05