弾性率・表面エネルギー・摩擦力の同時評価法の提案とフラーレン薄膜への応用

概要

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The material properties of thin films (C_<60>, CN and TiN) are studied using a homebuit surface force apparatus (SFA). Elastic modulus and surface energy of these films are derived from the load-contact area relationship, based on the continuum elastic theory. The elastic and surface energy of C_<60> thin films 3〜50nm in thickness almost remain constancy and are estimated to be 9.0±3 GPa and 40mN/m, respectively, which is in agreement with those of C_<60> thick films. The method proposed in this paper is applicable for an ultrathin film 3nm in thickness, although the conventional method such as a nanoindentor are not possible. Furthermore, the elastic modulus (surface energy) of a CN film 36nm in thickness and a TiN film 46nm in thickness are estimated to be 82±10 Gpa (34mN/m) and 104±10 GPa (13mN/m), respectively.
公益社団法人精密工学会の論文
2003-05-05