5自由度制御型能動空気軸受(第2報) : 軸の回転以外の5自由度運動制御

概要

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The aim of this research is to develop the air rotary bearing which has the following capability: (1) compensation of motion errors of the axis (high accuracy), (2) reduction of motion errors and residual vibrations which external disturbances cause (high stiffness and high vibration damping), (3) control of five degrees-of-freedom axis motion of the rotating axis (new function). To realize these, the authors have proposed an "Active Air Rotary Bearing" (AARB). In this report, a control system with PID-PD controllers is designed to control the five degrees-of-freedom axis motion. By using the control system, the AARB achieves; (1) 10nm positioning resolutions (x, y, z directions), 0.02arcsec positioning resolutions (φΨ directions), (2) almost infinite static stiffness and increased damping capability, (3) compensation of motion errors of the rotating axis.
公益社団法人精密工学会の論文
1994-04-05