超音波多重位相差方式による3次元座標の測定

概要

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Development of three dimensional (3 D) measuring machines which are not equipped with axes; x, y, z axes and/or joint axes, is important because such machines do not suffer from the Abbe's errors, play and clearance of joint axes, and/or elastic deformation of mechanisms. This paper first introduces the principle of a new coordinate measurement system using ultrasonic waves in which : (1) some fixed receivers receive several kinds of ultrasonic signals from a movable transmitter, (2) from the phase shifts between the transmitted and received signals, distances of the transmitter from the receivers are calculated, and (3) from the distances, 3 D coordinates of the transmitter are determined by triangulation. Secondly, the paper explains a measuring setup. Some experimental results in a space of 300 mm×300 mm×1000 mm shows that the errors of 1 D measurements are less than 0.2 mm and those of 2 D and 3 D are less than 1 mm and 2 mm respectively. The causes of the errors are also discussed.
公益社団法人精密工学会の論文
1986-02-05