振動モードの節を利用した機構設計によるガルバノスキャナの高精度位置決め制御

概要

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This paper presents a structural and controller design approach for fast response and high-precision positioning systems. In order to achieve high positioning performance, it is important to compensate for the effects of mechanical vibration modes around the control bandwidth on the performance, where the suppression of the vibrations by the controller design should be effective, as well as optimize the positioning mechanism. Therefore, in this research, the primary vibration mode is canceled by the structural design in which a node corresponding to the mode is considered; the design guideline is led based on mode shapes obtained by modal analysis. According to the mechanism that we have designed, fast and precise positioning can be effectively achieved in the case of a simple mechanical structure. The proposed approach has been verified by experiments involving the use of a positioning device used for industrial galvano scanners.
社団法人電気学会の論文
2011-03-01