圧電素子を用いたセルフセンシングアクチュエーションによるガルバノミラーの制振制御

概要

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This paper presents a method for suppressing the vibration of galvanometric mirrors used in laser positioning systems. In such systems, it is important to carry out fast and high-precision positioning of the mirror and maintain the flatness of the mirror after positioning, so that the required control specifications are achieved. However, resonant vibrations of the mirror, which are excited by the moment force during positioning, lead to residual vibrations after positioning, thereby, deteriorating the flatness of the mirror and laser manufacturing accuracy. Therefore, we attempt to suppress such vibrations by mounting a piezoelectric element on the mirror, so that the functions of the actuator and sensor of the piezoelectric element are made use of when designing the vibration suppression controller. The applicability of the proposed method to industrial galvano scanners has been verified by performing experiments using a positioning device.