Fabrication of Short-Range Ordered Nanoholes on Silicon Surfaces by Electron Irradiation

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2007-01-15

著者

• Takeda Seiji

  Department of Materials Science, Faculty of Science Hiroshima University

• IIJIMA Sumio

  Fundamental Research Laboratories, NEC Corporation

• OHNO Yutaka

  Department of Quantum Engineering, Nagoya University

• Ohno Yutaka

  Department Of Physics Graduate School Of Science Osaka University

• ICHIHASHI Toshinari

  Fundamental Research Laboratories, NEC Corporation

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