Copper Interconnects Fabricated by Dry Etching Process
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概要
- 論文の詳細を見る
- 1995-08-21
著者
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Ito T
Osaka Univ. Osaka Jpn
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Yamaji T
Tokyo Denki Univ. Tokyo Jpn
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YAMANOBE Tomomi
Semiconductor Tech. Lab., Oki Electric Industry Co., Ltd.
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Yamanobe T
Oki Electric Ind. Co. Ltd. Tokyo Jpn
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IGARASHI Yasushi
Semiconductor technology Laboratory, OKI Electric Industry Co., Ltd.
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ITO Toshio
Semiconductor technology Laboratory, OKI Electric Industry Co., Ltd.
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Igarashi Y
Semiconductor Tech.lab. Oki Electric Industry Co. Ltd.
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Igarashi Yasushi
Semiconductor Tech.Lab., Oki Electric Industry Co., Ltd.
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