C Stability in Si_<1-y>C_y Epitaxial Films Grown by Low-Temperature Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-04-15
著者
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KONAGAI Makoto
Department of Physical Electronics, Tokyo Institute of Technology
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YAGI Shuhei
Department of Physical Electronics, Tokyo Institute of Technology
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ABE Katsuya
Department of Physical Electronics, Tokyo Institute of Technology
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YAMADA Akira
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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