Effect of the Structural Change of Hydrogenated Microcrystalline Silicon Thin Films Prepared by Hot-Wire Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-07-15
著者
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YAMADA Akira
Quantum Nanoelectronics Research Center, Tokyo Institute of Technology
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KONAGAI Makoto
Department of Physical Electronics, Tokyo Institute of Technology
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HIZA Shuichi
Department of Physical Electronics, Tokyo Institute of Technology
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MATSUDA Wataru
Department of Physical Electronics, Tokyo Institute of Technology
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