A Study of Digitally Controllable Radio Frequency Micro Electro Mechanical Systems Inductor
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概要
- 論文の詳細を見る
This work proposes a micro electro mechanical systems (MEMS)-based digitally controlled solenoid-inductor. The inductor is fabricated by using a MEMS process. 2-bit tuning characteristics are measured, and tuning linearity and $Q$-factor degradation due to switching loss are discussed. The linear inductance tuning from 1.7 to 2.2 nH was achieved at 2 GHz. A $Q$-factor of more than ten was observed in the frequency range of 1.2 to 7.4 GHz. The validity of the proposed inductor was confirmed by investigating the effect of switch resistance.
- 2011-05-25
著者
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Amakawa Shuhei
Solution Science Research Laboratory (SSRL), Tokyo Institute of Technology
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Mizuochi Yutaka
Solution Science Research Laboratory (ssrl) Tokyo Institute Of Technology
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Masu Kazuya
Solutions Research Laboratory Tokyo Institute Of Technology
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Ishihara Noboru
Solutions Research Laboratory Tokyo Institute Of Technology
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Shirane Atsushi
Solutions Research Laboratory, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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Mizuochi Yutaka
Solutions Research Laboratory, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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