Effect of Overlayer Viscoelasticity on Resonant Characteristics of a Quartz Crystal Resonator

概要

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The generalized equations correlating the resonant characteristics, such as frequency and admittance, and rheological properties of an overlayer applied on the electrode interaface of a quartz crystal resonator are derived from the mechanics of the quartz movement using an electric equivalent circuit. The resulting correlations generalize the relationship between the resonant characteristics and the rheological properties of an overlayer leading to multiple sets of viscosity and elastic shear modulus for a given set of resonant characteristics. The extreme cases of the generalized equations are in accordance with the results of previous studies of separate problems. In the case of a Newtonian fluid overlayer, the derived correlation of the resonant frequency explains the experimental result of the viscosity effect on the frequency. The experimental results for a spin-coated polyethylene are analyzed using the full equations as well as the approximated ones leading to the good agreement between the two, and the agreement implies that we can employ the equivalent circuit theory — not so much different from that without an overlayer — in analyzing the experimental data with the quartz crystal resonator.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2010-06-25