Thin Film Solar Cells Prepared on Low Thermal Budget Polycrystalline Silicon Seed Layers
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概要
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In this work, we present data from solar cells with Si grown by plasma-enhanced chemical vapour deposition as the absorber material prepared on polycrystalline silicon seed layers. For the seed layer preparation, the reverse aluminum-induced layer exchange (R-ALILE) process is used. In contrast to the conventional ALILE process, the R-ALILE results in a smooth top surface of the polycrystalline silicon and to the automatic formation of an Al-back contact, which both are beneficial for solar cell preparation. We found that the proper treatment of the seed layers prior to the absorber layer deposition is crucial for a good solar cell performance. Here, we investigated different wet chemical methods (HF-solution, Al-etch) and the influence of an H2-plasma treatment. Furthermore, we studied the influence of an additional Ag/indium tin oxide (ITO)-back contact on the solar cell performance. We find that solar cell efficiencies over 5% can be obtained using the presented seed layer concept. The results obtained in this work can help to improve the epitaxial overgrowth of seed layers.
- 2010-11-25
著者
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Matsui Takuya
Research Center For Photovoltaics National Institute Of Advanced Industrial Science And Technology (
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Stutzmann Martin
Walter Schottky Institut
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Kondo Michio
Research Center For Photovoltaic Technologies Aist
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Matsui Takuya
Research Center for Photovoltaics, National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Karasawa Minoru
Research Center for Photovoltaics, National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Jaeger Christian
Walter Schottky Institut and Physics Department, Technische Universität München, Am Coulombwall 4, 85748 Garching, Germany
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Takeuchi Masayoshi
Research Center for Photovoltaics, National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Stutzmann Martin
Walter Schottky Institut and Physics Department, Technische Universität München, Am Coulombwall 4, 85748 Garching, Germany
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Kondo Michio
Research Center for Photovoltaics, National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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