Effect of Residual Acetylene Gas on Growth of Vertically Aligned Carbon Nanotubes
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概要
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We have investigated the effect of residual reaction gas on the growth of vertically aligned carbon nanotubes (CNTs) synthesized by chemical vapor deposition (CVD). The concentration of acetylene resident in gas lines and a CVD chamber decreased exponentially with time and even a small amount of residual acetylene affects the CNT growth. The residual acetylene reacts with the catalyst particles of Fe and reduces the catalytic activity of Fe particles under the temperature of 500 °C. As a result, both the length and bulk density of the grown CNTs decreased with increasing residual acetylene concentration.
- 2008-04-25
著者
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Pan Lujun
Department Of Physics And Electronics Osaka Prefecture University
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Nakayama Yoshikazu
Department Of Electrical Engineering College Of Engineering University Of Osaka
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Akita Seiji
Department Of Physics And Electronics College Of Engineering University Of Osaka Prefecture
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Yamaguchi Masao
Department Of Allergy And Rheumatology University Of Tokyo Graduate School Of Medicine
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Nakayama Yoshikazu
Department of Physics and Electronics, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japan
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Akita Seiji
Department of Physics and Electronics, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japan
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Pan Lujun
Department of Physics and Electronics, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japan
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