Radical Fluxes in Electron Cyclotron Resonance Plasma Chemical Vapor Deposition of Amorphous Silicon
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-11-15
著者
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Zhang Mei
Department Of Chemistry Wuhan University
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NAKAYAMA Yoshikazu
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University
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Nakayama Yoshikazu
Department Of Electrical Engineering College Of Engineering University Of Osaka
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Zhang Mei
Department Of Physics And Electronics University Of Osaka Prefecture
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Nakayama Yoshikazu
Department Of Physics And Electronics University Of Osaka Prefecture
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- Extraction of Inner Shell from Multiwall Carbon Nanotubes for Scanning Probe Microscope Tip
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