A Low Temperature Preparation of BaTiO3 Thin Film by Sol-Gel-Hydrothermal Treatment below 210°C

概要

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BaTiO3 thin films with a perovskite structure have been prepared by the hydrohermal treatment of TiO2 gel films at temperatures below 210°C. The TiO2 gel films were produced at 200°C by the sol-gel method and then were transformed into crystalline BaTiO3 thin films with the hydrothermal treatment in Ba(OH)2 alkaline aqueous solutions below 210°C. The hydrothermal crystallization of BaTiO3 thin films depends remarkably on the prebaking temperature of the TiO2 gel film, and the morphology depends on the Ba(OH)2 concentration, but the crystalline structure is not changed according to the results of XRD $\theta$-$2\theta$ and reciprocal space mapping measurements. The microscopic structure is columnar for BaTiO3 thin films treated in Ba(OH)2 solutions greater than 0.3 M and is granular for those treated in solutions less than 0.2 M. The morphology of the BaTiO3 thin film treated in 0.2 M Ba(OH)2 solution is an island structure near the surface and granular near the bottom. The BaTiO3 thin film treated at 210°C for 3 h in 0.2 M Ba(OH)2 solution has a hysteresis loop showing 5 μC/cm2 at zero electric field.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2005-09-15