Low Driving Voltage Amorphous In--Ga--Zn--O Thin Film Transistors with Small Subthreshold Swing Using High-$\kappa$ Hf--Si--O Dielectrics

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概要

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• Low driving voltage thin-film transistors (TFTs) were fabricated by integrating both a sputtered high-$\kappa$ Hf--Si--O gate dielectric and an amorphous In--Ga--Zn--O active layer on a silicon substrate. The influence of postdeposition annealing (PDA) temperature for the Hf--Si--O gate dielectric on device performance was investigated. The 400 °C PDA Hf--Si--O/a-In--Ga--Zn--O TFT exhibits a low threshold voltage of 0.005 V, a small subthreshold swing ($\mathit{SS}$) of 0.11 V$\cdot$dec-1, a high saturation mobility of 12.7 cm2$\cdot$V-1$\cdot$s-1, and an acceptable current ratio of $3\times 10^{5}$. The low threshold voltage and small $\mathit{SS}$ are attributed to the excellent gate control ability which allows the device to operate at 2.0 V for low power applications.

• 2010-12-25

著者

• Wu Chien-hung

  Department Of Nuclear Science National Tsing-hua University

• Chiang Chen-kuo

  Institute Of Microelectronics Dept. Of Electrical Eng. National Cheng Kung Univ.

• Wang Shui-jinn

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University

• Chiang Chen-Kuo

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.

• Huang Hau-Yuan

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.

• Huang Yen-Chieh

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.

• Su Je-Yi

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.

• Wu Chien-Hung

  Department of Electronics Engineering, Chung Hua University, Hsinchu, Taiwan 30012, R.O.C.

• Wu Chien-Hung

  Department of Electronics Engineering, Chung Hua University, Hsinchu 30012, Taiwan, R.O.C.

• Wang Shui-Jinn

  Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.

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