The Influence of Oxygen Concentration in the Sputtering Gas on the Self-synthesis of Tungsten Oxide Nanowires on Sputter-deposited Tungsten Films
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Chen Chao-hsuing
Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University
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Wang Shui-jinn
Institute Of Microelectronics Dept. Of Electrical Eng. National Cheng Kung Univ.
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Kuo Yi-cheng
Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University
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KO Rong-Ming
Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University
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Wang Shui-jinn
Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University
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WANG Yu-Yu
Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University
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Ko Rong-ming
Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University
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Wang Yu-yu
Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University
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