Development of Gas Sensors Based on Tungsten Oxide Nanowires in Metal/SiO2/Metal Structure and Their Sensing Responses to NO2
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概要
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In this work, the fabrication of gas sensors utilizing self-synthesized tungsten oxide nanowires (TONWs) and their response to NO2 are reported. The gas sensor is based on a sputter-deposited WCx/SiO2/WCx triple-layer structure with the periphery of the SiO2 layer etched chemically. Self-synthesized TONWs with crystalline W18O49(010) were grown by simple thermal annealing in nitrogen ambient, which linked, in parallel, the upper and lower WCx electrodes for gas sensing. The TONW-based sensors increased in resistance in NO2 because the surface of TONWs comprised oxygen adsorbates and the adjacent space charge region was electron-depleted. The amount of enlargement in resistance increased with increasing temperature. To improve the detectability of the parallel-connected TONW-based sensor, a connection of several individual sensors in series was proposed to enlarge the number of TONWs for gas sensing. For the 8-series-connected sensor, a sensitivity as high as 9.3, a response time as low as about 9 s, and a detectability as low as 2 ppm for NO2 were obtained.
- 2008-04-25
著者
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Liou Bor-wen
Department Of Computer Science And Information Engineering Wu-feng Institute Of Technology
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Fan Ga-hong
Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University
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Lin Jun-ku
Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University
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Shu Wen-i
Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University
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Wang Shui-jinn
Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University
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Wen Zhi-fu
Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University
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Ko Rong-ming
Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University
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Lin Jun-Ku
Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan 70101, Taiwan, Republic of China
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Ko Rong-Ming
Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan 70101, Taiwan, Republic of China
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Liou Bor-Wen
Department of Computer Science and Information Engineering, Wu-Feng Institute of Technology, Chiayi Country 621, Taiwan, Republic of China
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