Robust High-κ HfO_xN_y n-MOSFETs Using Low Work Function TbN Gate
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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Wang Shui-jinn
Institute Of Microelectronics Dept. Of Electrical Eng. National Cheng Kung Univ.
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Wu Chien-hung
Institute Of Microelectronics Dept. Of Electrical Eng. National Cheng Kung Univ.
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Chiang Chen-kuo
Institute Of Microelectronics Dept. Of Electrical Eng. National Cheng Kung Univ.
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SU Nai-Chao
Institute of Microelectronics, Dept. of Electrical Eng., National Cheng Kung Univ.
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CHENG Ching-Cheng
Institute of Microelectronics, Dept. of Electrical Eng., National Cheng Kung Univ.
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Su Nai-chao
Institute Of Microelectronics Dept. Of Electrical Eng. National Cheng Kung Univ.
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Wang Shui-jinn
Institute Of Microelectronics Department Of Electrical Engineering National Cheng Kung University
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Cheng Ching-cheng
Institute Of Microelectronics Dept. Of Electrical Eng. National Cheng Kung Univ.
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