20312 ディスペンサと精密ステージの組合せによる微粒子のパターン化自己整列(OS3 機械工学が支援する微細加工技術(半導体・MEMS・NEMS)(4),オーガナイズドセッション)

概要

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Drying-up suspension that contains fine particles, regular nanostructures of the particles are self-assembled. This is one of the effective processes to produce large-scale nano-structures This paper proposes a patterned self-assembly with the combimation of dispensor and stage control. The spreading of suspension is affected by various factors and width of pattern will change. Thus, the relationship between control variables and pattern width toestablish the control to keep the pattern accuracy. It was found from the basic experiment using only water that gap between the nozzle and substrate should be controlled precisely as well as the control of other parameters as dispense rate. Finally, line patterns assembly of silica particles of 1μm in diameter were fabricated using suspension.
2010-03-09