T1101-1-4 パターン基板へ自己整列を用いた異種粒子複合構造の作製(マイクロナノ理工学:nmからmmまでの表面制御とその応用(1))

概要

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Chemically and/or geometrically patterned substrates allow us easily to fabricate micro-structured fine particles by using self-assembly process. This present paper intends to report some test results about alternate arrangement of different particles by using two-step drawing with particle immobilization. The patterned substrate consists of micrometer-scale grooves and mesa, the top of which are locally covered with octadecyltrichlorosilane film to be hydrophobic. 1μm-silica particles are accurately self-assembled on only micro-grooves by first drawing step from a suspension, and then chemically immobilized through a dehydration condensation reaction. Second drawing step enables 500nm-silica particles to be assembled on mesa mainly, uncovered with lp.m-silica particles. Namely, it is demonstrated that two-step drawing of self-assembly can fabricate alternate arrangements of different particles.
社団法人日本機械学会の論文
2009-09-12