空気静圧軸受の利用による超精密案内面の設計と評価

概要

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A design procedure of ultra precise linear guideway is discussed with respect to its desired material property first and it was clarified that alumina ceramics suit for ultra precise applications because of its high specific rigidity and possibility to finish precisely by lapping operations. Secondary, the surface-restricted-type air bearing is adopted in order to make the bearing stiffness higher with the smaller bearing clearance. A prototype slider was made, the performances of which does not coincide so well with the theory which was reported previously^<5)>. But the prototype had shown that its stiffness becomes high, up to about 200 N/μm with the bearing area of 200×120 mm. With the help of present report, it is possible to design more accurate and rigid linear guideway which may be applicable to the various engineering fields.
公益社団法人精密工学会の論文
1989-05-05