T1602-2-4 窒化炭素膜の極表面せん断抵抗のAFM測定([T1602-2]マイクロナノ理工学:nmからmmまでの表面制御とその応用(2))

概要

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Carbon nitride (CNx) coating is one of the carbonaceous materials, which was reported to show superlow friction coefficient (μ<0.009) in Nitrogen environment. Therefore CNx coating is a promising material of solid lubricant for sliding interfaces to reduce friction. The superlow friction appeared after running in process of several hundreds of friction cycles and its mechanism has not been completely clarified yet. It was proposed that the soft thin layer generated on CNx coating after running-in process contributed to the superlow friction. However, the shearing strength of the superficial layer of CNx coating has not been experimentally shown because of its small thickness estimated to be 10 nm or less. So we carried out in-depth measurements of the friction force of CNx film against a cantilever tip by nanoscratching test using an atomic force microscope. Then the existence of thin, low-shear layer on the top of CNx coating after running-in process was experimentally shown.
2010-09-04