大気中におけるCN_x膜の摩擦摩耗特性の基板温度による制御(機械要素,潤滑,工作,生産管理など)

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It was investigated that tribological properties of CN_x coating slid against a Si_3N_4 ball in ambient air with 5 different temperatures of CN_x as 23, 75, 100, 125, and 150℃ and 4 different humidity conditions as <5, 20-30, 40-50, and 60-70%RH during sliding tests. These friction tests result indicated that friction coefficient was lower than 0.05 when CN_x temperature was higher than 125℃ at 60-70%RH, 100℃ at 20-50%RH, and 75℃ at <5%RH. The specific wear rate was within a range of 10^<-7>mm^3/Nm in several humidity conditions. It could be within a range of 10^<-8>mm^3/Nm when the CN_x temperature was higher than 125℃ at 60-70%RH, 100℃ at 20-50%RH, and 23℃ at <5%RH. It was observed that the CN_x structure and composition of wear tracks were not changed before and after sliding tests with a Raman spectroscopy and an AES. To show a controllability of CN_x coating's friction coefficient against a Si_3N_4 ball with temperature of substrate, we performed friction test between CN_x and a Si_3N_4 ball with rising temperature of CN_x surface from room temperature to 100℃ and then cooling to room temperature. Friction coefficient was 0.18 at room temperature, which decreased to 0.01-0.02 at 100℃ after rising temperature. After cooling the CN_x substrate to room temperature, friction coefficient returned to 0.18 that was the same as the initial value. These results indicated the friction of CN_x against a Si_3N_4 ball can be controlled with the temperature of CN_x in air.
社団法人日本機械学会の論文
2008-11-25

大気中におけるCN_x膜の摩擦摩耗特性の基板温度による制御(機械要素,潤滑,工作,生産管理など)

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