2106 CNx膜硬さに及ぼす成膜時基板冷却の影響(物性・試験評価法,一般講演)

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The carbon nitride (CNx) coating is one of the promising materials such as high wear proof, superlow friction. It was reported that CNx coating showed superlow friction when it slid against Si_3N_4 ball in N_2 environment. From the view point of industrial field, 1.0 μm thickness and 20 GPa hardness is necessary to CNx coating. We investigated the effect of substrate cooling temperature, N ion beam accelerate voltage, deposition rate, and the thickness on its hardness. As a result, N ion beam accelerate voltage, deposition rate, and thickness was not effective to the hardness of CNx coating. On the other hand, it was clear that the CNx coating hardness increased from 10 to 20 GPa with decreasing of substrate temperature. From the Raman analysis, I_D/I_G ratio and G peak position decreased with decreasing substrate temperature. These results indicated that sp^3 structure which included in CNx coating increased, and then the hardness of itself increased.
2010-04-18