CNx膜の超低摩擦発現メカニズムへの軟質薄膜摩擦理論の適用(J23-1 マイクロナノ理工学(1),J23 マイクロナノ理工学)

概要

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In this study, we hypothesized that super low friction phenomenon of a-CNx could be explained by friction model of solid lubrication. Mechanical properties which friction test area or non-friction test area of CNx surfaces were used to calculate theoretical friction coefficient by this model. Following conclusions were obtained. 1. Shearing strength of CNx was measured by scratching by diamond tip. It was cleared that friction area had lower shearing strength than non-friction area. 2. Nano-indentation hardness of CNx in friction-and non-friction area was measured. In the result, friction area became softer than non-friction area. 3. Super low friction was able to happen if low shearing surface was generated within the depth of 23.0 nm.
一般社団法人日本機械学会の論文
2004-09-04