2111 AFMを用いたCNx膜のSi_3N_4探針との付着力に及ぼす窒素中摩擦の影響(OS2-3 トライボロジーとその応用(3))

概要

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To clarify the effect of shearing strength on superlow friction mechanism of CNx coating, we compared between adhesive forces of Si_3N_4 AFM stylus to the surface of as-deposited CNx and wear track of CNx which showed friction lower than 0.01. Then, we investigated the effect of N_2 gas on the adhesive force of these surfaces, when N_2 gas was supplied to contact interface during measuring the adhesive forces. (1) The wear track of CNx which showed low friction in N_2 provided relatively lower adhesive force under N_2 blowing condition than under O_2 blowing condition. However, it was clear that the adhesive force of the wear track in air was almost the same as that of as-deposited surface. (2) The surface roughness of the wear track decreased after sliding in N_2. However, we could not obtain obvious difference between the adhesive force of the wear track and that of the as-deposited surface in air.
社団法人日本機械学会の論文
2006-05-28