ダイヤモンドライクカーボン膜の大気中摩擦係数に及ぼす紫外線照射の影響(機械要素,潤滑,設計,生産加工,生産システムなど)

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Low friction mechanism of hydrogenated Diamond-Like Carbon (a-C:H) was assumed that sp^3 structures were destructed to graphite-like having low shearing strength. However, these structural changes generally occur when a-C:H coating was rubbed during several thousand cycles so-called running-in process. However, long running-in process is not necessaly. So it is required to obtain low friction surface by a substitute process. From the view point of reformation of structure, we focused on ultraviolet ray (UV) irradiation. It was assumed that UV was able to destruct the a-C:H topmost surface to graphite-like when the ray intensity exceeded C-C single bond energy, and generated dangling bonds were assumed to combine. We prepared PECVD a-C:H coatings which were irradiated with UV of 254, 312, and 365nm wavelengths for 60min. These specimens and asdeposited a-C:H were tested with a ball-on-disk type friction tester, operating at 0.084m/s and 0.1N, and counter material was Si_3N_4 balls with 8mm diameter. During 250 to 4500 cycles, friction coefficient of 254 and 312nm UV irradiated a-C:H exhibited 0.02 to 0.05, which value was less than that of un-irradiated a-C:H. 254 and 312nm UV irradiated a-C:H exhibited similar C KLL peak to HOPG (Highly Oriented Pyrolytic Graphite). The hardness of UV irradiated a-C:H changed from 11.5 to 13.1GPa. Moreover, the surface roughness of each a-C:H did not change by UV irradiation. These results indicated that a structural change in the topmost surface to graphite-like structure was an important roll to obtain low friction coefficient.
2010-11-25

ダイヤモンドライクカーボン膜の大気中摩擦係数に及ぼす紫外線照射の影響(機械要素,潤滑,設計,生産加工,生産システムなど)

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