P3-58 扇形圧電振動子を用いたインホイール型マイクロ超音波モータ(ポスター発表)

概要

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This paper presents the design, fabrication and basic measurement results of a micro ultrasonic motor using sector shaped piezoelectric ceramics vibrators. The analysis result by the FEM showed that the sector shaped vibrator can magnify vibration amplitude compared to a rectangular plate vibrator. The sector shaped vibrator has contact parts with a rotor from inner side. This micro motor has advantages, such as high-torque, thin, light and compact. The outer diameter of vibrator was 9.8mm, the inner diameter was 5.2mm, and the thickness was 0.8mm. The vibrator's 1^<st> longitudinal mode and 2^<nd> bending mode resonance frequency were about 360 kHz. The ultrasonic motor rotated 164rpm under the condition of an applied voltage of 20V_<P-P>.
超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
2006-11-15