電磁アクチュエータ一体型マイクロリニアポンプ

概要

論文の詳細を見る
In recent years, research and development of the micro-fluid systems have been activated in the field of chemical technology and biotechnology. Micro-fluid systems are realized by micromachine technology and MEMS technology. Micro pump is an essential element for miniaturization of chemical analysis reaction systems. The aim of this research is development of a micro linear pump which will be built into micro-fluid systems. This pump aims to take a sample of very-small-quantity of liquids. Taking a sample of very-small-quantity of liquids reduce the amount used and waste fluid of a reagent. Full length and diameter of this pump are 32.5mm and 6mm respectively. The features of this pump are (1) the pump is built with actuator, (2) the gap of 7μm between piston and cylinder is achieved through fine machining process, and (3) micro check-valves of 2mm diameter made of stainless-steel film are fabricated and integrated. In this paper, the structure and the characteristics of this pump were shown. And the characteristics after improvement of micro check-valves were shown.
社団法人電気学会の論文
2005-12-01