P3-13 走査型プローブ顕微鏡用エッジモードプローブセンサ(ポスター発表)

概要

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This paper describes the design and experimental results of an edge mode probe sensor. The edge mode is an oscillating mode which vibration concentrates on the end. It is consider that an edge mode probe sensor realize high frequency resonance, easy to be fixed and has an ability to be attached on tool. The sensor consists of a Ti plate, the dimensions of 10×4×0.1mm and two PZT plate, the dimensions of 10×4×0.2mm. One PZT plate is for the oscillating and the other is for the detecting of vibration. In the experiment, a voltage signal for detecting of the vibration responded to the contact with a sample. This result shows a capability of contact detection by the probe sensor.
超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
2006-11-15