2A1-F09 超音波振動攪拌機構を用いた水熱合成法による一体型圧電薄膜アクチュエータ(MEMSとナノテクノロジー)

概要

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In this study, the monolithic piezoelectric thin film actuator has been fabricated by a hydrothermal method using ultrasonic vibration mixing device. Compared with the conventional rotation mixing device in hydrothermal method, the ultrasonic vibration mixing device was effective for the generation of uniformity piezocrystallization. In addition, uniform micrometer order thick piezoelectric film was deposited on titanium substrate which had comparatively large and high-aspect ratio structure. The dimensions of the monolithic piezoelectric actuator ware 34mm in length, 43.6mm in width, and 2mm in depth. The maximum experimental displacement value was 0.1μm for X direction driving at the applied voltage of 0.25V_<p-p>.
一般社団法人日本機械学会の論文
2008-06-06