617 ステッピングモータで駆動される3自由度半導体ウエハ搬送ロボットの軌道追従制御

概要

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This study deals with the trajectory tracking control of a three-degree-of-freedom semiconductor wafer transfer robot driven hybrid stepping motors. The desired trajectory of the end of the robot is set to be a straight line, and the desired posture of the third link is constant. The high-precision control of the hybrid stepping motor is executed with the microstep drive technique. The desired joint angle is obtained by the microstep technique and the trajectory planning based on the inverse kinematics. The desired trajectories with the fourth-order polynomial and the trapezoidal velocity pattern are used as the desired trajectory of the end of the third link. From the numerical calculation results and the experimental results, it is confirmed that the trajectory tracking control of the three-degree-of-freedom semiconductor wafer transfer robot can be successfully executed by the present high-precision control system with microstep drive technique.
一般社団法人日本機械学会の論文
2005-08-22