ステッピングモータで駆動される3自由度半導体ウエハ搬送ロボットアームの軌道追従制御と誤差解析

概要

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This study deals with the trajectory tracking control of a three-degree-of-freedom semiconductor wafer transfer robot arm driven hybrid stepping motors. The desired trajectory of the end of the robot is set to be a straight line, and the desired posture of the third link is constant. The high-precision control of the hybrid stepping motor is executed with the microstep drive technique. The desired joint angle is obtained by the microstep technique and the trajectory planning method based on the inverse kinematics. From the numerical calculation results and the experimental results, it is confirmed that the trajectory tracking control of the three-degree-of-freedom semiconductor wafer transfer robot arm can be successfully executed by the present high-precision control system with microstep drive technique. Furthermore, the error of the end of the robot arm is theoretically investigated.
一般社団法人日本機械学会の論文
2006-07-25