The Low Temperature Bonding between Si and Electrode Using Sputtered Ag Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-10-15
著者
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Onuki Jin
Akita Prefectural University
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Koizumi M
Department Of Electronics And Information Systems Faculty Of Systems Science And Technology Akita Pr
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Onuki J
Dep. Of Materials Sci. And Engineering Ibaraki Univ.
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Onuki J
Akita Prefectural Univ. Honjo Jpn
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Katou Mitsuo
Akita Prefectural University
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Komiyama Takao
Department Of Electronic And Information Systems Faculty Of Systems Science And Technology Akita Pre
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SAWAHATA Mamoru
Hitachi Research Laboratory, Hitachi Ltd.
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KOMIYAMA Takao
Akita Prefectural University
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CHONAN Yasunori
Akita Prefectural University
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Suwa M
Hitachi Research Laboratory Hitachi Ltd.
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Chonan Yasunori
Department Of Electronics And Information System Faculty Of System Science And Technology Akita Pref
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