Effect of High-Temperature Annealing in Vacuum and Hydrogen on Paramagnetic Defects in Diamond Films Grown by Chemical Vapor Deposition

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概要

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• Diamond films of high quality were prepared by hot-filament chemical vapor deposition, and were annealed at a temperature of between 1300-1400℃ in vacuum and hydrogen atmosphere. The electron spin resonance (ESR) spectrum did not change in shape and intensity for the films annealed in vacuum, but it changed in shape for the films annealed in hydrogen. This change could not be explained if the ESR signal was attributed to a single center such as an H1 center. From computer simulation for the ESR spectrum, we found that two more centers are necessary besides the Hl center. The change in shape produced by annealing in hydrogen resulted from a change in the relative amounts of the three centers. [DOI: 10.1143/JJAP.41.770]

• 社団法人応用物理学会の論文
• 2002-02-15

著者

• Watanabe Ichiro

  Department of Cardiology, Nihon University School of Medicine

• Watanabe I

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Kanazawa University

• Watanabe I

  Sankyo Co. Ltd. Tokyo Jpn

• Kawaguchi Y

  Photonics Research Institute National Institute Of Advanced Industrial Science And Technology (aist)

• YATA Masaru

  Department of Electrical and Electronic Engineering, Faculty of Engineering, Kanazawa University

• KANATANI Minoru

  Department of Electrical and Electronic Engineering, Faculty of Engineering, Kanazawa University

• KAWAGUCHI Yuhsuke

  Department of Electrical and Electronic Engineering, Faculty of Engineering, Kanazawa University

• Yata Masaru

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Kanazawa University

• Kanatani Minoru

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Kanazawa University

• Kawaguchi Yuhsuke

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Kanazawa University

• Kawaguchi Yuhsuke

  Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University

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