ESR in Diamond Thin Films Synthesized by Microwave Plasma Chemical Vapor Deposition : Surfaces, Interfaces and Films
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概要
- 論文の詳細を見る
A variety of diamond films of poor and good quality are synthesized by microwave plasma CVD from a mixture of hydrogen and CH_4, CH_3OH or C_2H_5OH. A comparative study on the ESR and Raman spectra of these films is performed. The diamond films of good quality have a spin density of 〜10^<18> cm^<-3>. The peak-to-peak linewidth in the ESR signal varies from 6.1 G in the film of poor quality to 3.0 G in the film of good quality. This change can be used as a convenient method for evaluating the quality of diamond films.
- 社団法人応用物理学会の論文
- 1988-10-20
著者
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Watanabe Ichiro
Department of Cardiology, Nihon University School of Medicine
-
SUGATA Ken
Department of Pediatrics, Fujita Health University School of Medicine
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Sugata K
School Of Science And Engineering Woseda University:crest Jst (japan Science And Technology Corporat
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Sugata Ken
Department Of Electronics Faculty Of Technology Kanazawa University
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