Diamond Films Synthesized by Microwave Plasma CVD of Ethyl Alcohol, etc. : Surfaces, Interfaces and Films
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概要
- 論文の詳細を見る
Diamond films have been synthesized by the microwave plasma CVD of methane, ethyl alcohol, methyl alcohol and acetone which are diluted with hydrogen. The films are evaluated by X-ray diffraction, SEM image and Raman spectroscopy. When ethyl and methyl alcohols are used, the diamond particles grow at a higher rate with lower gas pressure compared with the case of methane. The lower gas pressure facilitates the preparation of films with a uniform thickness over an available region (5×3.3 cm^2) of a reaction tube.
- 社団法人応用物理学会の論文
- 1988-08-20
著者
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Watanabe Ichiro
Department of Cardiology, Nihon University School of Medicine
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Sugata Ken
Department Of Electronics Faculty Of Technology Kanazawa University
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