Low Temperature Synthesis of Diamond Films in Thermoassisted RF Plasma Chemical Vapor Deposition. II
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概要
- 論文の詳細を見る
Diamond films are synthesized using a radio-frequency (13.56 MHz) plasma and external heating by infrared radiation. A film without nondiamond carbon is deposited at temperatures of 350-600℃ from a mixture of C_2H_5OH and H_2. Diamond quality at low temperature is improved by changing the impedance-matching condition of the radio-frequency system, incorporation of O_2, or incorporation of CF_4. In these trials, the incorporation of CF_4 is most effective for the improvement of diamond quality. A high-quality film is deposited even at 350℃ from a mixture of 0.5% C_2H_5OH, 0,5% CF_4 and 99% H_2 without using external heating. The quality improves as the temperature is increased up to 550℃.
- 社団法人応用物理学会の論文
- 1997-02-15
著者
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Watanabe Ichiro
Department of Cardiology, Nihon University School of Medicine
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Watanabe I
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kanazawa University
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Watanabe I
Sankyo Co. Ltd. Tokyo Jpn
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YOSHIE Koushin
Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University
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Yoshie Koushin
Department Of Electrical And Computer Engineering Faculty Of Engineering Kanazawa University:(presen
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