Chemical Vapor Deposition of TiN Films from Tetrakis(ethylmethylamido)titanium and Ammonia
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概要
- 論文の詳細を見る
TiN films were prepared using a new Ti precursor, tetrakis(ethylmethylamido)titanium (TEMAT) and ammonia. The premixing of NH_3 and TEMAT provided the control over the gas phase reaction of the two reactants to generate the intermediates required for the deposition of high-quality TiN films. Film resistivities of 800-1200 μΩ-cm and low levels of impurities were obtained in TiN films deposited under the condition of low NH_3/TEMAT ratios, wafer temperature of 350℃ and total reactor pressure of 1 Torr. In addition, the introduction of a small amount of ammonia improved the diffusion barrier property for Cu metallization up to 600℃. Slight degradation in the conformality of TiN films was observed at the low ratio of NH_3/TEMAT. Furthermore, the addition of NH_3 tended to improve the surface morphology of TiN films and did not cause any particle generation due to the low process pressure of 1 Torr. X-ray photoelectron spectroscopy (XPS) analysis revealed the role of ammonia in the homogeneous reaction.
- 社団法人応用物理学会の論文
- 1998-12-30
著者
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LEE Jae
School of Mechanical and Aerospace Engineering and Institute of Advanced Machinery and Design, Seoul
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LEE Chongmu
Department of Materials Science and Engineering, Inha University
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LEE Eun
Department of Anesthesiology and Pain Medicine, Asan Medical Center, University of Ulsan College of
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Lee Chongmu
Department Of Materiais Science And Engineering Inha University
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Lee Jae
School Of Computer Science And Engineering Sungshin Women's University
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Hong Ju
Department Of Materials Engineering Chunbuk National University
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Hong Hae
Agency For Defense Development
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Choi Jung
School Of Electrical Engineering And Inmc Seoul National University
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Shin H
Dong‐a Univ. Busan Kor
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Lee Jae
School Of Metallurgical Engineering Kookmin University
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Lee C
National Chung Hsing Univ. Taichung Twn
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Choi Jung
School Of Metallurgical Engineering Kookmin University
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SHIN Hyun
Ultra Pure Chemical Inc.
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Lee Jae
School Of Computer Science And Engineering Seoul National University
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Lee Eun
Department Of Materials Science & Engineering Chosun University
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Lee Eun
Department Of Anesthesiology And Pain Medicine Asan Medical Center University Of Ulsan College Of Me
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