Physical Properties of Highly Conformal TiN Thin films Grown by Atomic Layer Deposition
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-03-15
著者
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LEE Chongmu
Department of Materials Science and Engineering, Inha University
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Lee Chongmu
Department Of Materiais Science And Engineering Inha University
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Oh Ki-young
Jusung Engineering Co. Ltd.
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KIM Jaebum
Department of Materials Science and Engineering, Inha University
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HONG Hyunseok
Department of Materials Science and Engineering, Inha University
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GHOSH Subhankar
Department of Materials Science and Engineering, Inha University
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Kim Jaebum
Department Of Materials Science And Engineering Inha University
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Hong Hyunseok
Department Of Materials Science And Engineering Inha University
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Ghosh Subhankar
Department Of Materials Science And Engineering Inha University
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