Integration of Plasma-Assisted and Rapid Thermal Processing for Low-Thermal Budget Preparation of Ultra-Thin Dielectrics for Stacked-Gate Device Structures
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-12-30
著者
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Ma Yi
Department Of Physics North Carolina State University
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Hattangady Sunil
Department Of Materials Science And Engineering North Carolina State University
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LUCOVSKY Gerald
Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering,
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Lee David
Department Of Materials Science And Engineering North Carolina State University
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Whitten Jerry
Department Of Chemistry North Carolina State University
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Wortman Jimmie
Department Of Physics North Carolina State University
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JING Ze
Department of Physics, North Carolina State University
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LU Zhong
Department of Physics, North Carolina State University
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MISRA Veena
Department of Electrical and Computer Engineering, North Carolina State University
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Jing Ze
Department Of Physics North Carolina State University
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Lu Zhong
Department Of Physics North Carolina State University
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Misra Veena
Department Of Electrical And Computer Engineering North Carolina State University
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Lucovsky G
Departments Of Physics And Electrical And Computer Engineering North Carolina State University
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Lucovsky Gerald
Department Of Physics Materials Science And Engineering And Electrical And Computer Engineering Nort
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Lee David
Department Of Biological Science Florida International University
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- Integration of Plasma-Assisted and Rapid Thermal Processing for Low-Thermal Budget Preparation of Ultra-Thin Dielectrics for Stacked-Gate Device Structures
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